SUNRISE

离子注入机 ion implanter
LSS理论 Lindhand Scharff and Schiott theory　　又称“林汉德-斯卡夫-斯高特理论”。
沟道效应 channeling effect
射程分布 range distribution
深度分布 depth distribution
投影射程 projected range
阻止距离 stopping distance
阻止本领 stopping power
标准阻止截面 standard stopping cross section
退火 annealing
激活能 activation energy
等温退火 isothermal annealing
激光退火 laser annealing
应力感生缺陷 stress-induced defect
择优取向 preferred orientation
制版工艺 mask-making technology
图形畸变 pattern distortion
初缩 first minification
精缩 final minification
母版 master mask
铬版 chromium plate
干版 dry plate
乳胶版 emulsion plate
透明版 see-through plate
高分辨率版 high resolution plate,
HRP超微粒干版 plate for ultra-microminiaturization
掩模 mask
掩模对准 mask alignment
对准精度 alignment precision
光刻胶 photoresist　　又称“光致抗蚀剂”。
负性光刻胶 negative photoresist
正性光刻胶 positive photoresist
无机光刻胶 inorganic resist
多层光刻胶 multilevel resist
电子束光刻胶 electron beam resist
X射线光刻胶 X-ray resist
刷洗 scrubbing
甩胶 spinning
涂胶 photoresist coating
后烘 postbaking
光刻 photolithography
X射线光刻 X-ray lithography
电子束光刻 electron beam lithography
离子束光刻 ion beam lithography
深紫外光刻 deep-UV lithography
光刻机 mask aligner
投影光刻机 projection mask aligner
曝光 exposure
接触式曝光法 contact exposure method
接近式曝光法 proximity exposure method
光学投影曝光法 optical projection exposure method
电子束曝光系统 electron beam exposure system
分步重复系统 step-and-repeat system
显影 development
线宽 linewidth
去胶 stripping of photoresist
氧化去胶 removing of photoresist by oxidation
等离子［体］去胶 removing of photoresist by plasma
刻蚀 etching
干法刻蚀 dry etching
反应离子刻蚀 reactive ion etching,
RIE各向同性刻蚀 isotropic etching
各向异性刻蚀 anisotropic etching
反应溅射刻蚀 reactive sputter etching
离子铣 ion beam milling　　又称“离子磨削”。
等离子［体］刻蚀 plasma etching
钻蚀 undercutting
剥离技术 lift-off technology　　又称“浮脱工艺”。
终点监测 endpoint monitoring
金属化 metallization
互连 interconnection
多层金属化 multilevel metallization
电迁徙 electromigration
回流 reflow
磷硅玻璃 phosphorosilicate glass
硼磷硅玻璃 boron-phosphorosilicate glass
钝化工艺 passivation technology
多层介质钝化 multilayer dielectric passivation
划片 scribing
电子束切片 electron beam slicing
烧结 sintering
印压 indentation
热压焊 thermocompression bonding
热超声焊 thermosonic bonding
冷焊 cold welding
点焊 spot welding
球焊 ball bonding
楔焊 wedge bonding
内引线焊接 inner lead bonding
外引线焊接 outer lead bonding
梁式引线 beam lead
装架工艺 mounting technology
附着 adhesion
封装 packaging
金属封装 metallic packaging
陶瓷封装 ceramic packaging
扁平封装 flat packaging
塑封 plastic package
玻璃封装 glass packaging
微封装 micropackaging　　又称“微组装”。
管壳 package
管芯 die
引线键合 lead bonding
引线框式键合 lead frame bonding
带式自动键合 tape automated bonding,
TAB激光键合 laser bonding
超声键合 ultrasonic bonding
红外键合 infrared bonding